Section 2705 — California Fire Code (Title 24, Part 9)

2705.1 General.¶

The use and handling of hazardous materials shall comply with this section, Section 2703 and other applicable provisions of this code.

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2705.2 Fabrication areas. The use of hazardous materials in¶

fabrication areas shall be in accordance with Sections 2705.2.1 through 2705.2.3.4.

2705.2.1 Location of HPM in use in fabrication areas. Hazardous production materials in use in fabrication areas shall be within approved or listed gas cabinets, exhausted enclosures or a workstation.

2705.2.2 Maximum aggregate quantities in fabrication areas. The aggregate quantities of hazardous materials in a single fabrication area shall comply with Section 2704.2.2, and Table 2704.2.2.1. The quantity of HPM in use at a workstation shall not exceed the quantities listed in Table 2705.2.2.

2705.2.3 Workstations. Workstations in fabrication areas shall be in accordance with Sections 2705.2.3.1 through 2705.2.3.4.

2705.2.3.1 Construction. Workstations in fabrication areas shall be constructed of materials compatible with the materials used and stored at the workstation. The portion of the workstation that serves as a cabinet for HPM gases, Class I flammable liquids or Class II or Class IIIA combustible liquids shall be noncombustible and, if of metal, shall be not less than 0.0478-inch (18 gage) (1.2 mm) steel.

2705.2.3.2 Protection of vessels. Vessels containing hazardous materials located in or connected to a workstation shall be protected as follows:

HPM: Vessels containing HPM shall be protected from physical damage and shall not project from the workstation.
Hazardous cryogenic fluids, gases and liquids: Hazardous cryogenic fluid, gas and liquid vessels located within a workstation shall be protected from seismic forces in an approved manner in accordance with the California Building Code.
Compressed gases: Protection for compressed gas vessels shall also comply with Section 5303.5.
Cryogenic fluids: Protection for cryogenic fluid vessels shall also comply with Section 5503.5.

Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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SEMICONDUCTOR FABRICATION FACILITIES

TABLE 2705.2.2 MAXIMUM QUANTITIES OF HPM AT A WORKSTATION ^d

2705.2.3.3 Drainage and containment for HPM liq- uids. Each workstation utilizing HPM liquids shall have all of the following:

Drainage piping systems connected to a compatible system for disposition of such liquids.
The work surface provided with a slope or other means for directing spilled materials to the containment or drainage system.
An approved means of containing or directing spilled or leaked liquids to the drainage system.

2705.2.3.4 Pyrophoric solids, liquids and Class 3 water-reactive liquids. Pyrophoric liquids and Class 3 water-reactive liquids in containers greater than 0.5gallon (2 L) but not exceeding 5.3-gallon (20 L) capacity and pyrophoric solids in containers greater than 4.4 pounds (2 kg) but not exceeding 44 pounds (20 kg) shall be allowed at workstations where located inside cabinets and the following conditions are met:

Maximum amount per cabinet: The maximum amount per cabinet shall be limited to 5.3 gallons (20 L) of liquids and 44 pounds (20 kg) of total liquids and solids.
Cabinet construction: Cabinets shall be constructed in accordance with the following:

2.1. Cabinets shall be constructed of not less than 0.097-inch (2.5 mm) (12 gage) steel.

2.2. Cabinets shall be permitted to have selfclosing limited access ports or noncombustible windows that provide access to equipment controls.

2.3. Cabinets shall be provided with self- or manual-closing doors. Manual-closing doors shall be equipped with a door switch that will initiate local audible and visual alarms when the door is in the open position.

Cabinet exhaust ventilation system: An exhaust ventilation system shall be provided for cabinets and shall comply with the following:

3.1. The system shall be designed to operate at a negative pressure in relation to the surrounding area.

3.2. The system shall be equipped with monitoring equipment to ensure that required exhaust flow or static pressure is provided.

3.3. Low-flow or static pressure conditions shall send an alarm to the on-site emergency control station. The alarm shall be both visual and audible.

Cabinet spill containment: Spill containment shall be provided in each cabinet, with the spill containment capable of holding the contents of the aggregate amount of liquids in containers in each cabinet.

HPM CLASSIFICATION	STATE	MAXIMUM QUANTITY
Flammable, highly toxic, pyrophoric and toxic combined	Gas	Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet
Flammable	Liquid Solid	15 gallonsa, b 5 poundsa, b
Corrosive	Gas Liquid Solid	Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet Use-open system: 25 gallonsb Use-closed system: 150 gallonsb, e 20 poundsa, b
Highly toxic	Liquid Solid	15 gallonsa 5 poundsa
Oxidizer	Gas Liquid Solid	Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet Use-open system: 12 gallonsb Use-closed system: 60 gallonsb 20 poundsa, b
Pyrophoric	Liquid Solid	0.5 gallonc, f 4.4 poundsc, f
Toxic	Liquid Solid	Use-open system: 15 gallonsb Use-closed system: 60 gallonsb 5 poundsa, b
Unstable reactive Class 3	Liquid Solid	0.5 gallona, b 5 poundsa, b
Water-reactive Class 3	Liquid Solid	0.5 gallonc, f See Table 2704.2.2.1

For SI: 1 pound = 0.454 kg, 1 gallon = 3.785 L.

a. Maximum allowable quantities shall be increased 100 percent for closed

system operations. Where Note b applies, the increase for both notes shall be allowed.

b. Quantities shall be allowed to be increased 100 percent where

workstations are internally protected with an approved automatic fireextinguishing or suppression system complying with Chapter 9. Where Note a applies, the increase for both notes shall be allowed. Where Note e applies, the maximum increase allowed for both Notes b and e shall not exceed 100 percent.

c. Allowed only in workstations that are internally protected with an

approved automatic fire-extinguishing or fire protection system complying with Chapter 9 and compatible with the reactivity of materials in use at the workstation.

d. The quantity limits apply only to materials classified as HPM.

e. Quantities shall be allowed to be increased 100 percent for nonflammable,

noncombustible corrosive liquids where the materials of construction for workstations are listed or approved for use without internal fireextinguishing or suppression system protection. Where Note b applies, the maximum increase allowed for both Notes b and e shall not exceed 100 percent.

f. A maximum quantity of 5.3 gallons of liquids and 44 pounds of total

liquids and solids shall be allowed at a workstation where conditions are in accordance with Section 2705.2.3.4.

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Valves: Valves in supply piping between the product containers in the cabinet and the workstation served by the containers shall fail in the closed position upon power failure, loss of exhaust ventilation and upon actuation of the fire control system.
Fire detection system: Each cabinet shall be equipped with an automatic fire detection system complying with the following conditions:

6.1. Automatic detection system: UV/IR, high-sensitivity smoke detection (HSSD) or other approved detection systems shall be provided inside each cabinet.

6.2. Automatic shutoff: Activation of the detection system shall automatically close the shutoff valves at the source on the liquid supply.

6.3. Alarms and signals: Activation of the detection system shall initiate a local alarm within the fabrication area and transmit a signal to the emergency control station. The alarms and signals shall be both visual and audible.

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2705.3 Transportation and handling. The transportation¶

and handling of hazardous materials shall comply with Sections 2705.3.1 through 2705.3.4.1 and other applicable provisions of this code.

2705.3.1 Corridors and enclosures for stairways and ramps. Corridors and enclosures for exit stairways and ramps in new buildings or serving new fabrication areas shall not contain HPM, except as permitted in corridors by Section 415.11.6.4 of the California Building Code and Section 2705.3.2 of this code.

2705.3.2 Transport in corridors and enclosures for stairways and ramps. Transport in corridors and enclosures for stairways and ramps shall be in accordance with Sections 2705.3.2.1 through 2705.3.3.

2705.3.2.1 Fabrication area alterations. Where existing fabrication areas are altered or modified in existing buildings, HPM is allowed to be transported in existing corridors where such corridors comply with Section 5003.10 of this code and Section 415.11.2 of the Cali- fornia Building Code .

2705.3.2.2 HPM transport in corridors and enclo- sures for stairways and ramps. Nonproduction HPM is allowed to be transported in corridors and enclosures for stairways and ramps where utilized for maintenance, lab work and testing when the transportation is in accordance with Section 5003.10.

SEMICONDUCTOR FABRICATION FACILITIES

2705.3.3 Service corridors. Where a new fabrication area is constructed, a service corridor shall be provided where it is necessary to transport HPM from a liquid storage room, HPM room, gas room or from the outside of a building to the perimeter wall of a fabrication area. Service corridors shall be designed and constructed in accordance with the California Building Code.

2705.3.4 Carts and trucks. Carts and trucks used to transport HPM in corridors and enclosures for stairways and ramps shall comply with Section 5003.10.3.

2705.3.4.1 Identification. Carts and trucks shall be marked to indicate the contents.

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404 2019 CALIFORNIA FIRE CODE Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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CALIFORNIA FIRE CODE – MATRIX ADOPTION TABLE

Exceptions & meaning →