Chapter 27 — SEMICONDUCTOR FABRICATION FACILITIES

(Matrix Adoption Tables are nonregulatory, intended only as an aid to the code user.

See Chapter 1 for state agency authority and building applications.)

• The California Code of Regulations (CCR), Title 19, Division 1 provisions that are found in the California Fire Code are a reprint from the current CCR, Title 19, Division 1 text for the code user’s convenience only. The scope, applicability and appeals procedures of CCR, Title 19, Division I remain the same.

Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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394 2019 CALIFORNIA FIRE CODE Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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CHAPTER 27

SEMICONDUCTOR FABRICATION FACILITIES

User note:

About this chapter: Chapter 27 provides requirements that are intended to control hazards associated with the manufacture of electrical cir- cuit boards or microchips, commonly called semiconductors. Though the finished product possesses no unusual hazards, materials com- monly associated with semiconductor manufacturing are often quite hazardous and include flammable liquids, pyrophoric and flammable gases, toxic substances and corrosives. The requirements of this chapter are concerned with both life safety and property protection. How- ever, the fire code official should recognize that the risk of extraordinary property damages is far more common than the risk of personal inju- ries from fire. Section 415.11 of the International Building Code also addresses these facilities that are classified as Group H-5 occupancies.

Construction of semiconductor fabrication facilities shall be in accordance with Sections 2703.3.1 through 2703.3.9.

2703.3.1 Fabrication areas. Construction and location of fabrication areas shall comply with the California Build- ing Code .

2703.3.2 Pass-throughs in exit access corridors. Passthroughs in exit access corridors shall be constructed in accordance with the California Building Code .

2703.3.3 Liquid storage rooms. Liquid storage rooms shall comply with Chapter 57 and the California Building Code .

2703.3.4 HPM rooms. HPM rooms shall comply with the California Building Code .

2703.3.5 Gas cabinets. Gas cabinets shall comply with Section 5003.8.6.

2703.3.6 Exhausted enclosures. Exhausted enclosures shall comply with Section 5003.8.5.

2703.3.7 Gas rooms. Gas rooms shall comply with Section 5003.8.4.

2703.3.8 Service corridors. Service corridors shall comply with Section 2705.3 and the California Building Code .

2703.3.9 Cabinets containing pyrophoric liquids or water-reactive Class 3 liquids. Cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids in containers or in amounts greater than ¹ /2 gallon (2 L) shall comply with Section 2705.2.3.4.

An emergency plan shall be established as set forth in Section 403.7.1.

cesses. Maintenance of equipment, machinery and processes shall comply with Section 5003.2.6.

and equipment in HPM facilities shall comply with Sections 2703.7.1 through 2703.7.3.

2703.7.1 Fabrication areas. Electrical wiring and equipment in fabrication areas shall comply with the California Electrical Code.

2703.7.2 Workstations. Electrical equipment and devices within 5 feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall comply with the California Electrical Code for Class I, Division 2 hazardous locations. Workstations shall not be energized without adequate exhaust ventilation in accordance with Section 2703.14.

Exception: Class I, Division 2 hazardous electrical equipment is not required where the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.

2703.7.3 Hazardous production material (HPM) rooms, gas rooms and liquid storage rooms. Electrical wiring and equipment in HPM rooms, gas rooms and liquid storage rooms shall comply with the California Elec- trical Code .

Hazardous materials shall not be used or stored in corridors or enclosures for stairways and ramps.

used in an open-system use condition in service corridors.

An approved automatic sprinkler system shall be provided in accordance with Sections 2703.10.1 through 2703.10.5 and Chapter 9.

2703.10.1 Workstations and tools. The design of the sprinkler system in the area shall take into consideration the spray pattern and the effect on the equipment.

2703.10.1.1 Combustible workstations. A sprinkler head shall be installed within each branch exhaust connection or individual plenums of workstations of combustible construction. The sprinkler head in the exhaust connection or plenum shall be located not more than 2 feet (610 mm) from the point of the duct connection or the connection to the plenum. Where necessary to prevent corrosion, the sprinkler head and connecting piping in the duct shall be coated with approved or listed corrosion-resistant materials. Access to the sprinkler head shall be provided for periodic inspection.

Exceptions:

1. Approved alternative automatic fire-extinguishing systems are allowed. Activation of such systems shall deactivate the related processing equipment.

2. Process equipment that operates at temperatures exceeding 932°F (500°C) and is provided with automatic shutdown capabilities for hazardous materials.

3. Exhaust ducts 10 inches (254 mm) or less in diameter from flammable gas storage cabinets that are part of a workstation.

4. Ducts listed or approved for use without internal automatic sprinkler protection.

396 2019 CALIFORNIA FIRE CODE

Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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2703.10.1.2 Combustible tools. Where the horizontal surface of a combustible tool is obstructed from ceiling sprinkler discharge, automatic sprinkler protection that covers the horizontal surface of the tool shall be provided.

Exceptions:

1. An automatic gaseous fire-extinguishing local surface application system shall be allowed as an alternative to sprinklers. Gaseous-extinguishing systems shall be actuated by infrared (IR) or ultraviolet/infrared (UV/IR) optical detectors.

2. Tools constructed of materials that are listed as Class 1 or Class 2 in accordance with UL 2360 or approved for use without internal fireextinguishing system protection.

2703.10.2 Gas cabinets and exhausted enclosures. An approved automatic sprinkler system shall be provided in gas cabinets and exhausted enclosures containing HPM compressed gases.

Exception: Gas cabinets located in an HPM room other than those cabinets containing pyrophoric gases.

2703.10.3 Pass-throughs in existing exit access corri- dors. Pass-throughs in existing exit access corridors shall be protected by an approved automatic sprinkler system.

2703.10.4 Exhaust ducts for HPM. An approved automatic sprinkler system shall be provided in exhaust ducts conveying gases, vapors, fumes, mists or dusts generated from HPM in accordance with this section and the Califor- nia Mechanical Code .

2703.10.4.1 Metallic and noncombustible nonmetal- lic exhaust ducts. An approved automatic sprinkler system shall be provided in metallic and noncombustible nonmetallic exhaust ducts where all of the following conditions apply:

1. Where the largest cross-sectional diameter is equal to or greater than 10 inches (254 mm).

2. The ducts are within the building.

3. The ducts are conveying flammable gases, vapors or fumes.

2703.10.4.2 Combustible nonmetallic exhaust ducts. An approved automatic sprinkler system shall be provided in combustible nonmetallic exhaust ducts where the largest cross-sectional diameter of the duct is equal to or greater than 10 inches (254 mm).

Exceptions:

1. Ducts listed or approved for applications without automatic sprinkler system protection.

2. Ducts not more than 12 feet (3658 mm) in length installed below ceiling level.

2703.10.4.3 Exhaust connections and plenums of combustible workstations. Automatic fire-extinguishing system protection for exhaust connections and plenums of combustible workstations shall comply with Section 2703.10.1.1.

SEMICONDUCTOR FABRICATION FACILITIES

2703.10.4.4 Exhaust duct sprinkler system require- ments. Automatic sprinklers installed in exhaust duct systems shall be hydraulically designed to provide 0.5 gallons per minute (gpm) (1.9 L/min) over an area derived by multiplying the distance between the sprinklers in a horizontal duct by the width of the duct. Minimum discharge shall be 20 gpm (76 L/min) per sprinkler from the five hydraulically most remote sprinklers.

2703.10.4.4.1 Sprinkler head locations. Automatic sprinklers shall be installed at 12-foot (3658 mm) intervals in horizontal ducts and at changes in direction. In vertical runs, automatic sprinklers shall be installed at the top and at alternate floor levels.

2703.10.4.4.2 Control valve. A separate indicating control valve shall be provided for sprinklers installed in exhaust ducts.

2703.10.4.4.3 Drainage. Drainage shall be provided to remove sprinkler water discharged in exhaust ducts.

2703.10.4.4.4 Corrosive atmospheres. Where corrosive atmospheres exist, exhaust duct sprinklers and pipe fittings shall be manufactured of corrosion-resistant materials or coated with approved materials.

2703.10.4.4.5 Maintenance and inspection. Access to sprinklers in exhaust ducts shall be provided for periodic inspection and maintenance.

2703.10.5 Sprinkler alarms and supervision. Automatic sprinkler systems shall be electrically supervised and provided with alarms in accordance with Chapter 9. Automatic sprinkler system alarm and supervisory signals shall be transmitted to the emergency control station.

system shall be installed throughout buildings containing a Group H-5 occupancy. Activation of the alarm system shall initiate a local alarm and transmit a signal to the emergency control station. Manual fire alarm systems shall be designed and installed in accordance with Section 907.

Emergency alarm systems shall be provided in accordance with Sections 2703.12.1 through 2703.12.3, Section 5004.9 and Section 5005.4.4. The maximum allowable quantity per control area provisions of Section 5004.1 shall not apply to emergency alarm systems required for HPM.

2703.12.1 Where required. Emergency alarm systems shall be provided in the areas indicated in Sections 2703.12.1.1 through 2703.12.1.3.

2703.12.1.1 Service corridors. An approved emergency alarm system shall be provided in service corridors, with not less than one alarm device in the service corridor.

2703.12.1.2 Corridors and interior exit stairways and ramps. Emergency alarms for corridors, interior exit stairways and ramps and exit passageways shall comply with Section 5005.4.4.

2703.12.1.3 Liquid storage rooms, HPM rooms and gas rooms. Emergency alarms for liquid storage

Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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SEMICONDUCTOR FABRICATION FACILITIES

rooms, HPM rooms and gas rooms shall comply with Section 5004.9.

2703.12.2 Alarm-initiating devices. An approved emergency telephone system, local alarm manual pull stations, or other approved alarm-initiating devices are allowed to be used as emergency alarm-initiating devices.

2703.12.3 Alarm signals. Activation of the emergency alarm system shall sound a local alarm and transmit a signal to the emergency control station.

complying with Section 916 shall be provided for HPM gases where the physiological warning threshold level of the gas is at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases in accordance with Sections 2703.13.1 through 2703.13.2.2.

2703.13.1 Where required. A gas detection system shall be provided in the areas identified in Sections 2703.13.1.1 through 2703.13.1.4.

2703.13.1.1 Fabrication areas. A gas detection system shall be provided in fabrication areas where HPM gas is used in the fabrication area.

2703.13.1.2 HPM rooms. A gas detection system shall be provided in HPM rooms where HPM gas is used in the room.

2703.13.1.3 Gas cabinets, exhausted enclosures and gas rooms. A gas detection system shall be provided in gas cabinets and exhausted enclosures for HPM gas. A gas detection system shall be provided in gas rooms where HPM gases are not located in gas cabinets or exhausted enclosures.

2703.13.1.4 Corridors. Where HPM gases are transported in piping placed within the space defined by the walls of a corridor and the floor or roof above the corridor, a gas detection system shall be provided where piping is located and in the corridor.

Exception: A gas detection system is not required for occasional transverse crossings of the corridors by supply piping that is enclosed in a ferrous pipe or tube for the width of the corridor.

2703.13.2 Gas detection system operation. The gas detection system shall be capable of monitoring the room, area or equipment in which the HPM gas is located at or below all the following gas concentrations:

1. Immediately dangerous to life and health (IDLH) values where the monitoring point is within an exhausted enclosure, ventilated enclosure or gas cabinet.

2. Permissible exposure limit (PEL) levels where the monitoring point is in an area outside an exhausted enclosure, ventilated enclosure or gas cabinet.

3. For flammable gases, the monitoring detection threshold level shall be vapor concentrations in excess of 25 percent of the lower flammable limit (LFL) where the monitoring is within or outside an exhausted enclosure, ventilated enclosure or gas cabinet.

4. Except as noted in this section, monitoring for highly toxic and toxic gases shall also comply with Chapter 60.

2703.13.2.1 Alarms. The gas detection system shall initiate a local alarm and transmit a signal to the emergency control station when a short-term hazard condition is detected. The alarm shall be both visible and audible and shall provide warning both inside and outside the area where the gas is detected. The audible alarm shall be distinct from all other alarms.

2703.13.2.2 Shut off of gas supply. The gas detection system shall automatically close the shutoff valve at the source on gas supply piping and tubing related to the system being monitored for which gas is detected when a short-term hazard condition is detected. Automatic closure of shutoff valves shall comply with the following:

1. Where the gas-detection sampling point initiating the gas detection system alarm is within a gas cabinet or exhausted enclosure, the shutoff valve in the gas cabinet or exhausted enclosure for the specific gas detected shall automatically close.

2. Where the gas-detection sampling point initiating the gas detection system alarm is within a room and compressed gas containers are not in gas cabinets or exhausted enclosure, the shutoff valves on all gas lines for the specific gas detected shall automatically close.

3. Where the gas-detection sampling point initiating the gas detection system alarm is within a piping distribution manifold enclosure, the shutoff valve supplying the manifold for the compressed gas container of the specific gas detected shall automatically close.

Exception: Where the gas-detection sampling point initiating the gas detection system alarm is at the use location or within a gas valve enclosure of a branch line downstream of a piping distribution manifold, the shutoff valve for the branch line located in the piping distribution manifold enclosure shall automatically close.

ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with Sections 2703.14.1 through 2703.14.3, other applicable provisions of this code, the California Building Code and the California Mechanical Code .

2703.14.1 Where required. Exhaust ventilation systems shall be provided in the following locations in accordance with the requirements of this section and the California Building Code :

1. Fabrication areas: Exhaust ventilation for fabrication areas shall comply with the California Building Code . The fire code official is authorized to require additional manual control switches.

2. Workstations: A ventilation system shall be provided to capture and exhaust gases, fumes and vapors at workstations.

398 2019 CALIFORNIA FIRE CODE

Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.

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3. Liquid storage rooms: Exhaust ventilation for liquid storage rooms shall comply with Section 5004.3.1 and the California Building Code .

4. HPM rooms: Exhaust ventilation for HPM rooms shall comply with Section 5004.3.1 and the Califor- nia Building Code .

5. Gas cabinets: Exhaust ventilation for gas cabinets shall comply with Section 5003.8.6.2. The gas cabinet ventilation system is allowed to connect to a workstation ventilation system. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall also comply with Chapter 60.

6. Exhausted enclosures: Exhaust ventilation for exhausted enclosures shall comply with Section 5003.8.5.2. Exhaust ventilation for exhausted enclosures containing highly toxic or toxic gases shall also comply with Chapter 60.

7. Gas rooms: Exhaust ventilation for gas rooms shall comply with Section 5003.8.4.2. Exhaust ventilation for gas rooms containing highly toxic or toxic gases shall also comply with Chapter 60.

8. Cabinets containing pyrophoric liquids or Class 3 water-reactive liquids: Exhaust ventilation for cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids shall be as required in Section 2705.2.3.4.

2703.14.2 Penetrations. Exhaust ducts penetrating fire barriers constructed in accordance with Section 707 of the California Building Code or horizontal assemblies constructed in accordance with Section 711 of the California Building Code shall be contained in a shaft of equivalent fire-resistance-rated construction. Exhaust ducts shall not penetrate fire walls. Fire dampers shall not be installed in exhaust ducts.

2703.14.3 Treatment systems. Treatment systems for highly toxic and toxic gases shall comply with Chapter 60.

system shall be provided in Group H-5 occupancies in accordance with Section 1203. The emergency power system shall supply power automatically to the electrical systems specified in Section 2703.15.1 when the normal supply system is interrupted.

2703.15.1 Required electrical systems. Emergency power shall be provided for electrically operated equipment and connected control circuits for the following systems:

1. HPM exhaust ventilation systems.

2. HPM gas cabinet ventilation systems.

3. HPM exhausted enclosure ventilation systems.

4. HPM gas room ventilation systems.

5. HPM gas detection systems.

6. Emergency alarm systems.

7. Manual fire alarm systems.

8. Automatic sprinkler system monitoring and alarm systems.

SEMICONDUCTOR FABRICATION FACILITIES

9. Automatic alarm and detection systems for pyrophoric liquids and Class 3 water-reactive liquids required in Section 2705.2.3.4.

10. Flow alarm switches for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required in Section 2705.2.3.4.

11. Electrically operated systems required elsewhere in this code or in the California Building Code applicable to the use, storage or handling of HPM.

2703.15.2 Exhaust ventilation systems. Exhaust ventilation systems are allowed to be designed to operate at not less than one-half the normal fan speed on the emergency power system where it is demonstrated that the level of exhaust will maintain a safe atmosphere.

Subatmospheric pressure gas systems (SAGS) shall be in accordance with NFPA 318.