Chapter 27 — SEMICONDUCTOR FABRICATION FACILITIES
Section 2704
California Fire Code (Title 24, Part 9) · 2019 edition · updated 2026-09-10 · California
CBSC: official editions, supplements and errata
Italicized text is a California amendment to the model code, as printed in the official publication.
2704.1 General. Storage of hazardous materials shall comply¶
with Section 2703 and this section and other applicable provisions of this code.
2704.2 Fabrication areas. Hazardous materials storage and¶
the maximum quantities of hazardous materials in use and storage allowed in fabrication areas shall be in accordance with Sections 2704.2.1 through 2704.2.2.1.
2704.2.1 Location of HPM storage in fabrication areas. Storage of HPM in fabrication areas shall be within approved or listed storage cabinets, gas cabinets, exhausted enclosures or within a workstation as follows:
Flammable and combustible liquid storage cabinets shall comply with Section 5704.3.2.
Hazardous materials storage cabinets shall comply with Section 5003.8.7.
Gas cabinets shall comply with Section 5003.8.6. Gas cabinets for highly toxic or toxic gases shall also comply with Section 6004.1.2.
Exhausted enclosures shall comply with Section 5003.8.5. Exhausted enclosures for highly toxic or toxic gases shall also comply with Section 6004.1.3.
Workstations shall comply with Section 2705.2.3.
2704.2.2 Maximum aggregate quantities in fabrication areas. The aggregate quantities of hazardous materials stored or used in a single fabrication area shall be limited as specified in this section.
Exception: Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by Sections 5003.1.1, 5704.3.4 and 5704.3.5.
2704.2.2.1 Storage and use in fabrication areas. The maximum quantities of hazardous materials stored or used in a single fabrication area shall not exceed the quantities set forth in Table 2704.2.2.1.
Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.
100735044
SEMICONDUCTOR FABRICATION FACILITIES
TABLE 2704.2.2.1 QUANTITY LIMITS FOR HAZARDOUS MATERIALS IN A SINGLE FABRICATION AREA IN GROUP H-5 a
| HAZARD CATEGORY | SOLIDS (pounds/ |
LIQUIDS (gallons/ |
GAS (cubic feet @ NTP/ |
|---|---|---|---|
| Physical-hazard materials | Physical-hazard materials | Physical-hazard materials | Physical-hazard materials |
| Combustible dust | Note b | Not Applicable | Not Applicable |
| Combustible fiber Loose Baled |
Note b Notes b and c |
Not Applicable | Not Applicable |
| Combustible liquid Class II Class IIIA Class IIIB Combination Class I, II and IIIA |
Not Applicable | 0.01 0.02 Not Limited 0.04 |
Not Applicable |
| Cryogenic gas Flammable Oxidizing |
Not Applicable | Not Applicable | Note d 1.25 |
| Explosives | Note b | Note b | Note b |
| Flammable gas Gaseous Liquefied |
Not Applicable | Not Applicable | Note d Note d |
| Flammable liquid Class IA Class IB Class IC Combination Class IA, IB and IC Combination Class I, II and IIIA |
Not Applicable | 0.0025 0.025 0.025 0.025 0.04 |
Not Applicable |
| Flammable solid | 0.001 | Not Applicable | Not Applicable |
| Organic peroxide Unclassified detonable Class I Class II Class III Class IV Class V |
Note b Note b 0.025 0.1 Not Limited Not Limited |
Not Applicable | Not Applicable |
| Oxidizing gas Gaseous Liquefied Combination of Gaseous and Liquefied |
Not Applicable | Not Applicable | 1.25 1.25 1.25 |
| Oxidizer Class 4 Class 3 Class 2 Class 1 Combination oxidizer Class 1, 2, 3 |
Note b 0.003 0.003 0.003 0.003 |
Note b 0.03 0.03 0.03 0.03 |
Not Applicable |
| Pyrophoric | 0.01 | 0.00125 | Notes d and e |
| Unstable reactive Class 4 Class 3 Class 2 Class 1 |
Note b 0.025 0.1 Not Limited |
Note b 0.0025 0.01 Not Limited |
Note b Note b Note b Not Limited |
(continued)
400 2019 CALIFORNIA FIRE CODE
Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.
100735044
SEMICONDUCTOR FABRICATION FACILITIES
TABLE 2704.2.2.1—continued QUANTITY LIMITS FOR HAZARDOUS MATERIALS IN A SINGLE FABRICATION AREA IN GROUP H-5 a
| HAZARD CATEGORY | SOLIDS (pounds/ |
LIQUIDS (gallons/ |
GAS (cubic feet @ NTP/ |
|---|---|---|---|
| Physical-hazard materials | Physical-hazard materials | Physical-hazard materials | Physical-hazard materials |
| Water reactive Class 3 Class 2 Class 1 |
Note b 0.25 Not Limited |
0.00125 0.025 Not Limited |
Not Applicable |
| Health-hazard materials | Health-hazard materials | Health-hazard materials | Health-hazard materials |
| Corrosives | Not Limited | Not Limited | Not Limited |
| Highly toxics | Not Limited | Not Limited | Note d |
| Toxics | Not Limited | Not Limited | Note d |
For SI: 1 pound per square foot = 4.882 kg/m 2, 1 gallon per square foot = 40.7 L/m 2, 1 cubic foot @ NTP/square foot = 0.305 m 3 @ NTP/m 2,
1 cubic foot = 0.02832 m 3 . a. Hazardous materials within piping shall not be included in the calculated quantities. b. Quantity of hazardous materials in a single fabrication area shall not exceed the maximum allowable quantities per control area in Tables 5003.1.1(1) and
5003.1.1(2). c. Densely packed baled cotton that complies with the packing requirements of ISO 8115 shall not be included in this material class. d. The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases shall not exceed the greater of 0.2 cubic feet at NTP/square foot or 9,000 cubic
feet at NTP. e. The aggregate quantity of pyrophoric gases in the building shall not exceed the amounts set forth in Table 5003.8.2.
2704.3 Indoor storage outside of fabrication areas. The¶
indoor storage of hazardous materials outside of fabrication areas shall be in accordance with Sections 2704.3.1 through 2704.3.3.
2704.3.1 HPM storage. The indoor storage of HPM in quantities greater than those listed in Sections 5003.1.1 and 5704.3.4 shall be in a room complying with the requirements of the California Building Code and this code for a liquid storage room, HPM room or gas room as appropriate for the materials stored.
2704.3.2 Other hazardous materials storage. The indoor storage of other hazardous materials shall comply with Sections 5001, 5003 and 5004 and other applicable provisions of this code.
2704.3.3 Separation of incompatible hazardous materi- als. Incompatible hazardous materials in storage shall be separated from each other in accordance with Section 5003.9.8.
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