Chapter 27 — SEMICONDUCTOR FABRICATION FACILITIES
Section 2702
California Fire Code (Title 24, Part 9) · 2019 edition · updated 2026-09-10 · California
CBSC: official editions, supplements and errata
Italicized text is a California amendment to the model code, as printed in the official publication.
2702.1 Definitions. The following terms are defined in Chapter 2:¶
EMERGENCY CONTROL STATION.
FABRICATION AREA.
GAS DETECTION SYSTEM.
HAZARDOUS PRODUCTION MATERIAL (HPM).
HPM.
HPM ROOM.
PASS-THROUGH.
SEMICONDUCTOR FABRICATION FACILITY.
SERVICE CORRIDOR.
TOOL.
WORKSTATION.
Copyright © 2019 ICC. ALL RIGHTS RESERVED. Accessed by Kevin Day (kevin.day@dgs.ca.gov), (California Building Standards Commission) Order Number #100735044 on Jul 24, 2019 03:54 PM (PDT) pursuant to License Agreement with ICC. No further reproduction or distribution authorized. Single user only, copying and networking prohibited. ANY UNAUTHORIZED REPRODUCTION OR DISTRIBUTION IS A VIOLATION OF THE FEDERAL COPYRIGHT ACT AND THE LICENSE AGREEMENT, AND SUBJECT TO CIVIL AND CRIMINAL PENALTIES THEREUNDER.
100735044
SEMICONDUCTOR FABRICATION FACILITIES
ble provisions of this code, the California Building Code and the California Mechanical Code .
2703.2.3 Additional requirements for HPM supply pip- ing. In addition to the requirements in Section 2703.2, HPM supply piping and tubing for HPM gases and liquids shall comply with this section.
2703.2.3.1 General requirements. The requirements set forth in Section 5003.2.2.2 shall apply to supply piping and tubing for HPM gases and liquids.
2703.2.3.2 Health-hazard ranking 3 or 4 HPM. Supply piping and tubing for HPM gases and liquids having a health-hazard ranking of 3 or 4 shall be welded throughout, except for connections located within a ventilation enclosure if the material is a gas, or an approved method of drainage or containment provided for connections if the material is a liquid.
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