Chapter 27 — SEMICONDUCTOR FABRICATION FACILITIES
Section 2703 — GENERAL SAFETY PROVISIONS
2025 California Fire Code (Title 24, Part 9) · 2025 edition · ingested 2026-07-07 · California
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2703.1 Emergency control station. ¶
2703.1 Emergency control station. An emergency control station shall be provided in accordance with Sections 2703.1.1 through 2703.1.3. 2703.1.1 Location. The emergency control station shall be located on the premises at an approved location outside the fabrication area. 2703.1.2 Staffing. Trained personnel shall continuously staff the emergency control station. 2703.1.3 Signals. The emergency control station shall receive signals from emergency equipment and alarm and detection systems. Such emergency equipment and alarm and detection systems shall include, but not be limited to, the…
2703.2 Systems, equipment and processes. ¶
2703.2 Systems, equipment and processes. Systems, equipment and processes shall be in accordance with Sections 2703.2.1 through 2703.2.3.2. 2703.2.1 Application. Systems, equipment and processes shall include, but not be limited to, containers, cylinders, tanks, piping, tubing, valves and fittings. 2703.2.2 General requirements. In addition to the requirements in Section 2703.2, systems, equipment and processes shall comply with Section 5003.2, other applicable provisions of this code, the California Building Code and the California Mechanical Code . 2703.2.3 Additional requirements for HPM…
2703.3 Construction requirements. ¶
2703.3 Construction requirements. Construction of semiconductor fabrication facilities shall be in accordance with Sections 2703.3.1 through 2703.3.9. 2703.3.1 Fabrication areas. Construction and location of fabrication areas shall comply with the California Building Code . 2703.3.2 Pass-throughs in exit access corridors. Pass-throughs in exit access corridors shall be constructed in accordance with the California Building Code . 2703.3.3 Liquid storage rooms. Liquid storage rooms shall comply with Chapter 57 and the California Building Code . 2703.3.4 HPM rooms. HPM rooms shall comply with…
2703.4 Emergency plan. ¶
2703.4 Emergency plan. An emergency plan shall be established as set forth in Section 403.6.1.
2703.5 Maintenance of equipment, machinery and processes. ¶
2703.5 Maintenance of equipment, machinery and processes. Maintenance of equipment, machinery and processes shall comply with Section 5003.2.6.
2703.6 Security of areas. Areas shall be secured in accordance with Section 5003.9.2. ¶
2703.6 Security of areas. Areas shall be secured in accordance with Section 5003.9.2.
2703.7 Electrical wiring and equipment. ¶
2703.7 Electrical wiring and equipment. Electrical wiring and equipment in HPM facilities shall comply with Sections 2703.7.1 through 2703.7.3. 2703.7.1 Fabrication areas. Electrical wiring and equipment in fabrication areas shall comply with the California Electrical Code. 2703.7.2 Workstations. Electrical equipment and devices within 5 feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall comply with the California Electrical Code for Class I, Division 2 hazardous locations. Workstations shall not be energized without adequate exhaust…
2703.8 Corridors and enclosures for stairways and ramps. ¶
2703.8 Corridors and enclosures for stairways and ramps. Hazardous materials shall not be used or stored in corridors or enclosures for stairways and ramps.
2703.9 Service corridors. ¶
2703.9 Service corridors. Hazardous materials shall not be used in an open-system use condition in service corridors.
2703.10 Automatic sprinkler system. ¶
2703.10 Automatic sprinkler system. An approved automatic sprinkler system shall be provided in accordance with Sections 2703.10.1 through 2703.10.5 and Chapter 9. 2703.10.1 Workstations and tools. The design of the sprinkler system in the area shall take into consideration the spray pattern and the effect on the equipment. 2703.10.1.1 Combustible workstations. A sprinkler head shall be installed within each branch exhaust connection or individual plenums of workstations of combustible construction. The sprinkler head in the exhaust connection or plenum shall be 27-4 2025 CALIFORNIA FIRE CODE…
2703.11 Manual fire alarm system. ¶
2703.11 Manual fire alarm system. A manual fire alarm system shall be installed throughout buildings containing a Group H-5 occupancy. Activation of the alarm system shall initiate a local alarm and transmit a signal to the emergency control station. Manual fire alarm systems shall be designed and installed in accordance with Section 907.
2703.12 Emergency alarm system. ¶
2703.12 Emergency alarm system. Emergency alarm systems shall be provided in accordance with Sections 2703.12.1 through 2703.12.3, Section 5004.9 and Section 5005.4.4. The maximum allowable quantity per control area provisions of Section 5004.1 shall not apply to emergency alarm systems required for HPM. 2703.12.1 Where required. Emergency alarm systems shall be provided in the areas indicated in Sections 2703.12.1.1 through 2703.12.1.3. 2703.12.1.1 Service corridors. An approved emergency alarm system shall be provided in service corridors, with not less than one alarm device in the service…
2703.13 Gas detection systems. ¶
2703.13 Gas detection systems. A gas detection system complying with Section 916 shall be provided for HPM gases where the physiological warning threshold level of the gas is at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases in accordance with Sections 2703.13.1 through 2703.13.2.2. 2703.13.1 Where required. A gas detection system shall be provided in the areas identified in Sections 2703.13.1.1 through 2703.13.1.4. 2703.13.1.1 Fabrication areas. A gas detection system shall be provided in fabrication areas where HPM gas is used in the…
2703.14 Exhaust ventilation systems for HPM. ¶
2703.14 Exhaust ventilation systems for HPM. Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with Sections 2703.14.1 through 2703.14.3, other applicable provisions of this code, the California Building Code and the California Mechanical Code . 2703.14.1 Where required. Exhaust ventilation systems shall be provided in the following locations in accordance with the requirements of this section and the California Building Code : 1. Fabrication areas: Exhaust ventilation for fabrication areas shall comply with the California Building Code .…
2703.15 Emergency power system. ¶
2703.15 Emergency power system. An emergency power system shall be provided in Group H-5 occupancies in accordance with Section 1203. The emergency power system shall supply power automatically to the electrical systems specified in Section 2703.15.1 when the normal supply system is interrupted. 2703.15.1 Required electrical systems. Emergency power shall be provided for electrically operated equipment and connected control circuits for the following systems: 1. HPM exhaust ventilation systems. 2. HPM gas cabinet ventilation systems. 3. HPM exhausted enclosure ventilation systems. 4. HPM gas…
2703.16 Sub-atmospheric pressure gas systems. ¶
2703.16 Sub-atmospheric pressure gas systems. Sub-atmospheric pressure gas systems (SAGS) shall be in accordance with NFPA 318. on Jul 18, 2025 11:14 AM (CDT) THEREUNDER. SEMICONDUCTOR FABRICATION FACILITIES