Chapter 27 — SEMICONDUCTOR FABRICATION FACILITIES
Section 2705
California Fire Code (Title 24, Part 9) · 2022 edition · updated 2026-09-10 · California
CBSC: official editions, supplements and errata
Italicized text is a California amendment to the model code, as printed in the official publication.
2705.1 General.¶
The use and handling of hazardous materials shall comply with this section, Section 2703 and other applicable provisions of this code.
2705.2 Fabrication areas. The use of hazardous materials in¶
fabrication areas shall be in accordance with Sections 2705.2.1 through 2705.2.3.4.
2705.2.1 Location of HPM in use in fabrication areas. Hazardous production materials in use in fabrication areas shall be within approved or listed gas cabinets, exhausted enclosures or a workstation.
2705.2.2 Maximum aggregate quantities in fabrication areas. The aggregate quantities of hazardous materials in a single fabrication area shall comply with Section 2704.2.2 and Table 2704.2.2.1. The quantity of HPM in use at a workstation shall not exceed the quantities listed in Table 2705.2.2.
2705.2.3 Workstations. Workstations in fabrication areas shall be in accordance with Sections 2705.2.3.1 through 2705.2.3.4.
2705.2.3.1 Construction. Workstations in fabrication areas shall be constructed of materials compatible with the materials used and stored at the workstation. The portion of the workstation that serves as a cabinet for HPM gases, Class I flammable liquids or Class II or Class IIIA combustible liquids shall be noncombustible and, if of metal, shall be not less than 0.0478-inch (18 gage) (1.2 mm) steel.
2705.2.3.2 Protection of vessels. Vessels containing hazardous materials located in or connected to a workstation shall be protected as follows:
HPM: Vessels containing HPM shall be protected from physical damage and shall not project from the workstation.
Hazardous cryogenic fluids, gases and liquids: Hazardous cryogenic fluid, gas and liquid vessels located within a workstation shall be protected from seismic forces in an approved manner in accordance with the California Building Code .
Compressed gases: Protection for compressed gas vessels shall also comply with Section 5303.5.
Cryogenic fluids: Protection for cryogenic fluid vessels shall also comply with Section 5503.5.
2705.2.3.3 Drainage and containment for HPM liquids. Each workstation utilizing HPM liquids shall have all of the following:
Drainage piping systems connected to a compatible system for disposition of such liquids.
The work surface provided with a slope or other means for directing spilled materials to the containment or drainage system.
An approved means of containing or directing spilled or leaked liquids to the drainage system.
27-8 2022 CALIFORNIA FIRE CODE
Copyright © 2022 by, or licensed to, International Code Council, Inc. (ALL RIGHTS RESERVED); licensed to California Building Standards Commission pursuant to License Agreement. No further reproductions is authorized. Any unauthorized reproduction or distribution is a violation of the federal copyright act and the license agreement, and subject to civil and criminal penalties thereunder.
SEMICONDUCTOR FABRICATION FACILITIES
TABLE 2704.2.2.1 QUANTITY LIMITS FOR HAZARDOUS MATERIALS IN A SINGLE FABRICATION AREA IN GROUP H-5 a
| HAZARD CATEGORY | SOLIDS (pounds per square foot) |
LIQUIDS (gallons per square foot) |
GAS (cubic feet @ NTP per square foot) |
|---|---|---|---|
| Physical-Hazard Materials | Physical-Hazard Materials | Physical-Hazard Materials | Physical-Hazard Materials |
| Combustible dust | Note b | Not Applicable | Not Applicable |
| Combustible fiber Loose Baled |
Note b Notes b and c |
Not Applicable | Not Applicable |
| Combustible liquid Class II Class IIIA Class IIIB Combination Class I, II and IIIA |
Not Applicable | 0.01 0.02 Not Limited 0.04 |
Not Applicable |
| Cryogenic gas Flammable Oxidizing |
Not Applicable | Not Applicable | Note d 1.25 |
| Explosives | Note b | Note b | Note b |
| Flammable gas Gaseous Liquefied |
Not Applicable | Not Applicable | Note d Note d |
| Flammable liquid Class IA Class IB Class IC Combination Class IA, IB and IC Combination Class I, II and IIIA |
Not Applicable | 0.0025 0.025 0.025 0.025 0.04 |
Not Applicable |
| Flammable solid | 0.001 | Not Applicable | Not Applicable |
| Organic peroxide Unclassified detonable Class I Class II Class III Class IV Class V |
Note b Note b 0.025 0.1 Not Limited Not Limited |
Not Applicable | Not Applicable |
| Oxidizing gas Gaseous Liquefied Combination of gaseous and liquefied |
Not Applicable | Not Applicable | 1.25 1.25 1.25 |
| Oxidizer Class 4 Class 3 Class 2 Class 1 Combination Class 1, 2, 3 |
Note b 0.003 0.003 0.003 0.003 |
Note b 0.03 0.03 0.03 0.03 |
Not Applicable |
| Pyrophoric materials | 0.01 | 0.00125 | Notes d and e |
| Unstable (reactive) Class 4 Class 3 Class 2 Class 1 |
Note b 0.025 0.1 Not Limited |
Note b 0.0025 0.01 Not Limited |
Note b Note b Note b Not Limited |
| Water reactive Class 3 Class 2 Class 1 |
0.01f 0.25 Not Limited |
0.00125 0.025 Not Limited |
Not Applicable |
(continued)
Copyright © 2022 by, or licensed to, International Code Council, Inc. (ALL RIGHTS RESERVED); licensed to California Building Standards Commission pursuant to License Agreement. No further reproductions is authorized. Any unauthorized reproduction or distribution is a violation of the federal copyright act and the license agreement, and subject to civil and criminal penalties thereunder.
SEMICONDUCTOR FABRICATION FACILITIES
TABLE 2704.2.2.1—continued QUANTITY LIMITS FOR HAZARDOUS MATERIALS IN A SINGLE FABRICATION AREA IN GROUP H-5 a
| HAZARD CATEGORY | SOLIDS (pounds per square foot) |
LIQUIDS (gallons per square foot) |
GAS (cubic feet @ NTP per square foot) |
|---|---|---|---|
| Health-Hazard Materials | Health-Hazard Materials | Health-Hazard Materials | Health-Hazard Materials |
| Corrosives | Not Limited | Not Limited | Not Limited |
| Highly toxic | Not Limited | Not Limited | Note d |
| Toxics | Not Limited | Not Limited | Note d |
For SI: 1 pound = 0.454 kg, 1 pound per square foot = 4.882 kg/m 2, 1 gallon per square foot = 40.7 L/m 2, 1 cubic foot @ NTP/square foot = 0.305 m 3 @ NTP/m 2, 1 cubic foot = 0.02832 m 3 . a. Hazardous materials within piping shall not be included in the calculated quantities. b. Quantity of hazardous materials in a single fabrication area shall not exceed the maximum allowable quantities per control area in Tables 5003.1.1(1) and
5003.1.1(2). c. Densely packed baled cotton that complies with the packing requirements of ISO 8115 shall not be included in this material class. d. The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases shall not exceed the greater of 0.2 cubic feet at NTP/square foot or 9,000 cubic
feet at NTP. e. The aggregate quantity of pyrophoric gases in the building shall not exceed the amounts set forth in Table 5003.8.2. f. Quantity of Class 3 water-reactive solids in a single tool shall not exceed 1 pound.
2705.2.3.4 Pyrophoric solids, liquids and Class 3 water-reactive liquids. Pyrophoric liquids and Class 3 water-reactive liquids in containers greater than 0.5gallon (2 L) but not exceeding 5.3-gallon (20 L) capacity and pyrophoric solids in containers greater than 4.4 pounds (2 kg) but not exceeding 44 pounds (20 kg) shall be allowed at workstations where located inside cabinets and the following conditions are met:
Maximum amount per cabinet: The maximum amount per cabinet shall be limited to 5.3 gallons (20 L) of liquids and 44 pounds (20 kg) of total liquids and solids.
Cabinet construction: Cabinets shall be constructed in accordance with the following:
2.1. Cabinets shall be constructed of not less than 0.097-inch (2.5 mm) (12 gage) steel.
2.2. Cabinets shall be permitted to have selfclosing limited access ports or noncombustible windows that provide access to equipment controls.
2.3. Cabinets shall be provided with self- or manual-closing doors. Manual-closing doors shall be equipped with a door switch that will initiate local audible and visual alarms when the door is in the open position. 3. Cabinet exhaust ventilation system: An exhaust ventilation system shall be provided for cabinets and shall comply with the following:
3.1. The system shall be designed to operate at a negative pressure in relation to the surrounding area.
3.2. The system shall be equipped with monitoring equipment to ensure that required exhaust flow or static pressure is provided.
3.3. Low-flow or static pressure conditions shall send an alarm to the on-site emergency control station. The alarm shall be both visual and audible.
Cabinet spill containment: Spill containment shall be provided in each cabinet, with the spill containment capable of holding the contents of the aggregate amount of liquids in containers in each cabinet.
Valves: Valves in supply piping between the product containers in the cabinet and the workstation served by the containers shall fail in the closed position upon power failure, loss of exhaust ventilation and upon actuation of the fire control system.
Fire detection system: Each cabinet shall be equipped with an automatic fire detection system complying with the following conditions:
6.1. Automatic detection system: UV/IR, high-sensitivity smoke detection (HSSD) or other approved detection systems shall be provided inside each cabinet.
6.2. Automatic shutoff: Activation of the detection system shall automatically close the shutoff valves at the source on the liquid supply.
6.3. Alarms and signals: Activation of the detection system shall initiate a local alarm within the fabrication area and transmit a signal to the emergency control station. The alarms and signals shall be both visual and audible.
2705.3 Transportation and handling. The transportation¶
and handling of hazardous materials shall comply with Sections 2705.3.1 through 2705.3.4.1 and other applicable provisions of this code.
27-10 2022 CALIFORNIA FIRE CODE
Copyright © 2022 by, or licensed to, International Code Council, Inc. (ALL RIGHTS RESERVED); licensed to California Building Standards Commission pursuant to License Agreement. No further reproductions is authorized. Any unauthorized reproduction or distribution is a violation of the federal copyright act and the license agreement, and subject to civil and criminal penalties thereunder.
SEMICONDUCTOR FABRICATION FACILITIES
TABLE 2705.2.2 MAXIMUM QUANTITIES OF HPM AT A WORKSTATION d
| HPM CLASSIFICATION | STATE | MAXIMUM QUANTITY |
|---|---|---|
| Flammable, highly toxic, pyrophoric and toxic combined |
Gas | Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet |
| Flammable | Liquid | 15 gallonsa, b |
| Flammable | Solid | 5 poundsa, b |
| Corrosive | Gas | Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet |
| Corrosive | Liquid | Use-open system: 25 gallonsb Use-closed system: 150 gallonsb, e |
| Corrosive | Solid | 20 poundsa, b |
| Highly toxic | Liquid | 15 gallonsa, b |
| Highly toxic | Solid | 5 poundsa, b |
| Oxidizer | Gas | Combined aggregate volume of all cylinders at a workstation shall not exceed an internal cylinder volume of 39.6 gallons or 5.29 cubic feet |
| Oxidizer | Liquid | Use-open system: 12 gallonsb Use-closed system: 60 gallonsb |
| Oxidizer | Solid | 20 poundsa, b |
| Pyrophoric | Liquid | 0.5 gallonc, f |
| Pyrophoric | Solid | 4.4 poundsc, f |
| Toxic | Liquid | Use-open system: 15 gallonsb Use-closed system: 60 gallonsb |
| Toxic | Solid | 5 poundsa, b |
| Unstable reactive Class 3 | Liquid | 0.5 gallona, b |
| Unstable reactive Class 3 | Solid | 5 poundsa, b |
| Water-reactive Class 3 | Liquid | 0.5 gallonc, f |
| Water-reactive Class 3 | Solid | See Table 2704.2.2.1 |
For SI: 1 pound = 0.454 kg, 1 gallon = 3.785 L. a. Maximum allowable quantities shall be increased 100 percent for closed system operations. Where Note b applies, the increase for both notes shall be allowed. b. Quantities shall be allowed to be increased 100 percent where workstations are internally protected with an approved automatic fire-extinguishing or
suppression system complying with Chapter 9. Where Note a applies, the increase for both notes shall be allowed. Where Note e applies, the maximum increase allowed for both Notes b and e shall not exceed 100 percent. c. Allowed only in workstations that are internally protected with an approved automatic fire-extinguishing or fire protection system complying with Chapter 9
and compatible with the reactivity of materials in use at the workstation. d. The quantity limits apply only to materials classified as HPM. e. Quantities shall be allowed to be increased 100 percent for nonflammable, noncombustible corrosive liquids where the materials of construction for
workstations are listed or approved for use without internal fire-extinguishing or suppression system protection. Where Note b applies, the maximum increase allowed for both Notes b and e shall not exceed 100 percent. f. A maximum quantity of 5.3 gallons of liquids and 44 pounds of total liquids and solids shall be allowed at a workstation where conditions are in accordance
with Section 2705.2.3.4.
2705.3.1 Corridors and enclosures for stairways and ramps. Corridors and enclosures for exit stairways and ramps in new buildings or serving new fabrication areas shall not contain HPM, except as permitted in corridors by Section 415.11.7.4 of the California Building Code and Section 2705.3.2 of this code.
2705.3.2 Transport in corridors and enclosures for stairways and ramps. Transport in corridors and enclosures for stairways and ramps shall be in accordance with Sections 2705.3.2.1 through 2705.3.3.
2705.3.2.1 Fabrication area alterations. Where existing fabrication areas are altered or modified in existing
buildings, HPM is allowed to be transported in existing corridors where such corridors comply with Section 5003.10 of this code and Section 415.11.2 of the Cali- fornia Building Code .
2705.3.2.2 HPM transport in corridors and enclo- sures for stairways and ramps. Nonproduction HPM is allowed to be transported in corridors and enclosures for stairways and ramps where utilized for maintenance, lab work and testing when the transportation is in accordance with Section 5003.10.
2705.3.3 Service corridors. Where a new fabrication area is constructed, a service corridor shall be provided where
Copyright © 2022 by, or licensed to, International Code Council, Inc. (ALL RIGHTS RESERVED); licensed to California Building Standards Commission pursuant to License Agreement. No further reproductions is authorized. Any unauthorized reproduction or distribution is a violation of the federal copyright act and the license agreement, and subject to civil and criminal penalties thereunder.
SEMICONDUCTOR FABRICATION FACILITIES
it is necessary to transport HPM from a liquid storage room, HPM room, gas room or from the outside of a building to the perimeter wall of a fabrication area. Service corridors shall be designed and constructed in accordance with the California Building Code .
2705.3.4 Carts and trucks. Carts and trucks used to transport HPM in corridors and enclosures for stairways and ramps shall comply with Section 5003.10.3.
2705.3.4.1 Identification. Carts and trucks shall be marked to indicate the contents.
27-12 2022 CALIFORNIA FIRE CODE
Copyright © 2022 by, or licensed to, International Code Council, Inc. (ALL RIGHTS RESERVED); licensed to California Building Standards Commission pursuant to License Agreement. No further reproductions is authorized. Any unauthorized reproduction or distribution is a violation of the federal copyright act and the license agreement, and subject to civil and criminal penalties thereunder.
CALIFORNIA FIRE CODE – MATRIX ADOPTION TABLE
Get a plain-English answer with a citation back to this text.
Ask AI about this code