Chapter 27 — SEMICONDUCTOR FABRICATION FACILITIES
Section 2704
California Fire Code (Title 24, Part 9) · 2022 edition · updated 2026-09-10 · California
CBSC: official editions, supplements and errata
Italicized text is a California amendment to the model code, as printed in the official publication.
2704.1 General. Storage of hazardous materials shall comply¶
with Section 2703 and this section and other applicable provisions of this code.
2704.2 Fabrication areas. Hazardous materials storage and¶
the maximum quantities of hazardous materials in use and storage allowed in fabrication areas shall be in accordance with Sections 2704.2.1 through 2704.2.2.1.
2704.2.1 Location of HPM storage in fabrication areas. Storage of HPM in fabrication areas shall be within
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SEMICONDUCTOR FABRICATION FACILITIES
approved or listed storage cabinets, gas cabinets, exhausted enclosures or within a workstation as follows:
Flammable and combustible liquid storage cabinets shall comply with Section 5704.3.2.
Hazardous materials storage cabinets shall comply with Section 5003.8.7.
Gas cabinets shall comply with Section 5003.8.6. Gas cabinets for highly toxic or toxic gases shall also comply with Section 6004.1.2.
Exhausted enclosures shall comply with Section 5003.8.5. Exhausted enclosures for highly toxic or toxic gases shall also comply with Section 6004.1.3.
Workstations shall comply with Section 2705.2.3.
2704.2.2 Maximum aggregate quantities in fabrication areas. The aggregate quantities of hazardous materials stored or used in a single fabrication area shall be limited as specified in this section.
Exception: Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by Sections 5003.1.1, 5704.3.4 and 5704.3.5.
2704.2.2.1 Storage and use in fabrication areas. The maximum quantities of hazardous materials stored or used in a single fabrication area shall not exceed the quantities set forth in Table 2704.2.2.1.
2704.3 Indoor storage outside of fabrication areas. The¶
indoor storage of hazardous materials outside of fabrication areas shall be in accordance with Sections 2704.3.1 through 2704.3.3.
2704.3.1 HPM storage. The indoor storage of HPM in quantities greater than those listed in Sections 5003.1.1 and 5704.3.4 shall be in a room complying with the requirements of the California Building Code and this code for a liquid storage room, HPM room or gas room as appropriate for the materials stored.
2704.3.2 Other hazardous materials storage. The indoor storage of other hazardous materials shall comply with Sections 5001, 5003 and 5004 and other applicable provisions of this code.
2704.3.3 Separation of incompatible hazardous materi- als. Incompatible hazardous materials in storage shall be separated from each other in accordance with Section 5003.9.8.
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